Carbon nanotubes were synthesized by thermal chemical vapor deposition method using acetylene (C2H2)¬ as carbon precursor, permalloy (Fe19Ni81) as catalyst. The formation, dimension and morphology of nanotubes were strongly depended on the parameters of catalyst thin film and sintering temperature. At 750oC, with 10-nm thickness catalyst film, carbon nanotubes were aligned vertically, but when catalyst film was thicker than 20 nm, no CNT was observed. In the range from 650 oC to 850 oC, at higher sintering temperature, the obtained carbon nanotubes had larger diameter.
