The current paper introduces simulations results of The ultrasonic spray pyrolysis technics by finite element method. In order to get the optimal uniformity of deposited film on the substrate The technology parameters such as carried gas pressure, solution pump speed and distance from substrate to spray nozzle were varied. The study results showed that the optimal calculated pressure of carrier gas flow are from 60 lb/in2 to 80 lb/in2, the distance from substrate to spray nozzle are from 13 cm to 15 cm and solution pump speed smaller than 1,5 ml/min. The results obtained from experiments are compared with the simulated results and found to be similar to each other.
ultrasonic spray pyrolysis method, simulation, thin film
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TẠP CHÍ KHOA HỌC VÀ CÔNG NGHỆ Giấy phép số37/GP-BTTTT (15/01/2021) Giấy phép sửa đổi, bổ sung số140/GP-BTTTT (05/3/2021) Đơn vị cấp phép:Bộ Thông tin và Truyền thông Cơ quan chủ quản:Trường Đại học Bách Khoa Hà Nội Phó tổng biên tập phụ trách:GS. Đinh Văn Phong