In this paper, we report on design and simulation of a scanning probe micro-cantilever. The micro-cantilever consists of a sharp silicon tip integrated at the free end of the silicon fixed-free beam. The micro-cantilever is driven electrostatically using parallel plate capacitive-type actuation. The sharp silicon tip is in pyramid shape, which is created by the anisotropic etching of single-crystal silicon in potassium hydroxide. An electrode is spaced upper the back side of the cantilever with an air gap to form the capacitive-type actuation. The operation characteristics of the scanning probe micro-cantilever are simulated by finite element method. We study the displacement of the tip and the variation of capacitance depending on applied voltage. The operation of the cantilever in air environment is also investigated. The micro-cantilever is designed for application in the scanning probe lithography.
224-C1, Hanoi University of Science and Technology 1 Dai Co Viet, Hai Ba Trung, Hanoi, Vietnam Tel: +84 (024) 3623.0949 | email: firstname.lastname@example.org
TẠP CHÍ KHOA HỌC VÀ CÔNG NGHỆ Giấy phép số37/GP-BTTTT (15/01/2021) Giấy phép sửa đổi, bổ sung số140/GP-BTTTT (05/3/2021) Đơn vị cấp phép:Bộ Thông tin và Truyền thông Cơ quan chủ quản:Trường Đại học Bách Khoa Hà Nội Phó tổng biên tập phụ trách:GS. Đinh Văn Phong