NH3 gas detection by silicon nanowire – based sensors

Authors: Nguyễn Khắc Tùng, Nguyễn Công Tú, Nguyễn Hữu Lâm*


Gas sensors based on silicon nanowires was used to detect ammonia (NH3) gas at working temperature, from room temperature to 100 0C. The silicon nanowires were grown on the Si (111) surface using thermal evaporation method with gold (Au) nanoparticles played as catalysts. The Si nanowires, which have an average diameter of 15-30 nm were formed at a temperature of 1100 oC for 60 min and using argon as carrying gas and a mixture of silicon and carbon powders (ratio 1:1) as a material source. The silicon nanowire – based gas sensors showed response to NH3 gas, but non-response to water vapor, ethanol or aceton. The results of the sensor’s response showed that the NH3 gas sensor had a high response at working temperature of 80 oC.


Gas sensor, silicon nanowires, thermal evaporation;
Pages : 89-93

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